x射线衍射(XRD)

DIFFRAC。XRR

DIFFRAC。XRRis the powerful and easy-to-use software suite for the analysis of X-ray reflectometry measurements.

做marquants

综合x射线反射分析

DIFFRAC。XRRfeatures two different analysis approaches to best fit the user’s requirements:

  • 快速傅里叶变换(FFT)方法,从x射线反射(XRR)曲线快速估计层厚度与一个单一的鼠标点击。
  • 详细的XRR分析通过基于样本模型的拟合使用动态散射理论。

DIFFRAC。XRRis designed to maximize the user’s efficiency throughout the entire analysis process – from the creation of the sample model to the reporting of the results:

  • 灵活的样本建模,包括基于公式的参数和自由拟合变量。
  • 全面和可扩展的材料和样品数据库。雷竞技网页版
  • 先进的自动化和工作流功能,包括宏记录和逐步执行。
  • 自动分析和显示一系列反射率测量。
  • 晶圆映射数据评估,包括可定制的等高线图和统计分析。
  • 强大和广泛的报告生成器具有模板功能。

的特性

快速XRR分析使用FFT分析

当分析任务在于提取层厚时,采用DIFFRAC。XRRsets the benchmark: With a single mouse-click, the Estimate tool evaluates the layer thicknesses via a Fast Fourier Transform and directly displays the result in the corresponding graph of the XRR measurement.

通过全拟合进行详细的XRR分析

用于详细分析DIFFRAC。XRRapplies the dynamical scattering theory to perform accurate simulations. The parameters of the sample model (e.g. thickness, roughness, mass density ) are optimized by least-squares method to fit the XRR curve to the measured data. Experimental contributions like instrumental resolution, background, and the the sample size are integrated to accurately describe the measurements. Fast and stable fitting algorithms ensure best convergence and provide reliable results.

综合材料数据库

DIFFRAC。XRRfeatures a comprehensive and extendable material database. It includes amorphous and crystalline materials as well as mixed crystals up to quaternary compounds. The database offers calculation of structure factors or hkl patterns as well as X-ray properties like absorption, penetration depth, index of refraction, polarizability. To facilitate the creation of new database entries, .cif files and .str files can be directly imported.

具有无与伦比的灵活性的样本模型定义

从简单的songle层到高度复杂的包含超晶格和梯度- DIFFRAC。XRR掌握了所有这些。不同的界面粗糙度模型可以精确地描述不同的生长形态。层参数可以被链接以施加约束。额外自由变量的可用性为样本建模的灵活性设定了新的标准。

样本数据库更快,更有效的工作

DIFFRAC。XRRcomes with a powerful sample database.

可以创建、存储复杂的样本结构,然后直接加载到当前的分析项目中。这大大提高了日常工作的效率。

与测量软件DIFFRAC共享样本数据库。SUITE还允许更有效的实验计划,从而极大地支持DIFFRAC的PLAN.MEASURE.ANALYZE哲学。SUITE软件平台。

无与伦比的报告能力

DIFFRAC。XRRincludes a professional printing and reporting system for the creation of cutting edge, publication-ready graphics and full analysis reports.

用户定义和完全自定义的报表模板可以生成。报告可以直接打印,作为pdf文件共享,或通过.docx文档进一步编辑。

自动化

常规x射线反射率分析从未如此简单:DIFFRAC。XRRcan record macros and execute them in a single run or in a step-by-step mode.

工作流设计器为工作流的创建提供了一个直观的界面,该界面可以指导用户完成分析,甚至可以完全自动化地运行—从导入测量数据到报告结果。

测量分析

通常在不同的非环境条件下对样品进行一系列XRR测量。

DIFFRAC。XRRenables the easy and fast analysis of such data series: each refined parameter of the sample model can be displayed individually as a function of the non-ambient parameter. Additional statistical analysis is available to deliver maximum insight into the sample's properties and behaviour.

详细的晶片分析

晶片或区域映射允许确定样品的横向均匀性。

DIFFRAC。XRRfeatures full wafer analysis: Each refined sample parameter can be displayed as a contour, detailed statistics on the parameters can be displayed and sections along the surface allow for a detailed look at the local sample properties.

规范

DIFFRAC。XRRSpecifications

版本

当前软件版本为DIFFRAC。XRR V2.0。

分析方法

快速估计厚度的FFT方法。

基于递归矩阵形式的动态衍射理论。

有效密度模型(EDM)模拟超薄层。

快速模拟超晶格的本征波方法。

操作系统

Windows 8、8.1和10

64位

支持

留着你的DIFFRAC。最新XRR

免费维护更新

自由的DIFFRAC。XRRMaintenance Update renews your XRRversion to the most recent release. Regardless of your XRR license level, you can always download the latest Maintenance Update from www.brukersupport.com, free of charge!

下载过程

  • 注册在Bruker客户支持
  • 点击“软件”按钮
  • 搜索DIFFRAC。XRR维护更新
  • 下载更新

修正

通过保留你的DIFFRAC。最新XRR, you will benefit from all bugfixes made for the current but also all previously released versions, regardless of the license level. DIFFRAC.XRR Maintenance Updates are cumulative and can therefore be applied to any previous version.

什么是升级?

DIFFRAC。XRRMaintenance Updates do not come with new features. If you want to benefit from features introduced in new major releases you need to purchase the latest DIFFRAC.XRR upgrade.