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電子顕微鏡用分析装置

QUANTAX EDS（TEM）

XFlash®7T - ナノの世界を彩る : TEM/STEM用 EDS検出器

Single Atoms and Nanostructures

Get the Best Possible Results for each Specific Microscope

ハイライト

80
keV
最高の検出エネルギー範囲
すべての元素を明確に同定・定量
3
種
TEM用定量モデル
理論的および実験的クリフロリマー因子、ゼータ因子に基づく強力なTEM用定量手法を手軽に利用可能
1
Å
優れた空間分解能
ドリフト補正による高い安定性で原子や層などの周期構造をマッピング

透過電子顕微鏡でのナノスケール元素分析

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直観的なユーザーインターフェースで操作しやすく柔軟なESPRITソフトウェア

測定機器の使用時間を節約できるオフライン分析オプション

洗練されたEDS定量分析で測定データから情報を抽出 :

  • 選択可能な定量手順 :手軽に使用できる自動定量機能、カスタム条件設定、定量レシピの読み込み、カスタマイズおよび保存
  • 理論的および実験的クリフロリマー因子、ゼータ因子、ゼータ因子の補完機能を網羅した3種の定量メソッド
  • TEMならではの40 keV以上の高エネルギーピークを用いた明確な定量分析
  • 3種のバックグラウンドモデルが選択可能 : バルク試料用理論モデル、薄膜試料用理論モデル、数学的モデル
  • クリフロリマー定量では吸収補正を利用可能

利点

TEM、STEM、SEM (T-SEM)での薄膜試料の高空間分解能元素分析

  • 長年の実績に基づくスリムライン検出器デザインとそれぞれの顕微鏡ポールピースへの検出器配置の最適化により最適なソリューションを実現します
  • 最高の検出立体角と取り出し角による高速・高感度データ取得
  • 高速動作する安定な検出器ステージ
  • ナノスケールでのEDS分析に効果的なドリフト補正機能
  • 顕微鏡内加熱実験などの一連のデータを記録する時系列測定機能
  • スクリプト機能やAPIオプションを用いた測定・分析の自動化により分析ルーチン作成やバッチ処理が可能
  • 機械的干渉・電磁的干渉を抑えた検出器設計、試料傾斜、吸収、シャドーイング、システムピークを抑えた高品位なデータを取得し、測定後の補正を最小化
  • 最も洗練された薄膜試料用EDS定量分析で測定データから明確な分析結果を抽出
  • 長年のTEM-EDS分析の実績に基づく高品質なサポートとトレーニングにより装置を最大活用

アプリケーション

新世代TEM用EDS検出器 XFlash®7 で最高の結果を

© Image and sample courtesy of Michael Malaki, Shamail Ahmed; Material Science center, Faculty of physics, Philipps University Marburg

コーティングされたリチウムイオン電池正極材料のEDS分析

固体電池やリチウムイオン電池の容量維持率はNCM粒子のコーティング構造によって向上します。このナノメートル厚のコーティングを制御するためには元素分布を知る必要があります。 不規則な表面形状のミクロンサイズ正極粒子に対して、SEM-EDSおよびTEM-EDSでナノメートル空間分解能のEDS分析を行った結果をご紹介します。

Battery Analysis with TEM EDS

TEM-EDS元素分析のアプリケーション例

半導体
Deconvolution results at low X-ray energy of a spectrum obtained from a NiSi(Pt)

Quantification of the Pt Concentration in a NiSi(Pt)-NiSi2 Semiconductor Structure

This application example shows EDS data from the epitaxial growth of a Pt alloyed NiSi thin film and the quantification of a few at% of Pt alloyed in NiSi. NiSi is used for nm-sized metallization structures in semiconductor devices like MOSFETs.
詳細はこちら
Combined element maps of a layered system

Chemical Phase Analysis of a Layered Structure

It can be advantageous to check hyperspectral images for the existence of chemical phases without applying prior knowledge. Bruker’s ESPRIT AutoPhase automatically finds specimen regions of similar composition by analyzing a HyperMap based on Principle Component Analysis of the spectra. The sensitivity of this procedure can be adjusted. The approach is demonstrated using a multi-layer structure in cross-section as an example.
詳細はこちら
米ixed element map of nanowires

Chemical Characterization of Nanowires

Nanostructures, such as nanowires and nanorods and functionalized nanovehicles are of growing interest for various applications in nanotechnology, be that nano-electronics or drug delivery in the human body.
詳細はこちら
Single silicon atom in graphene

Identifiying a Single Atom on Graphene

Not only is it the highest art of EDS to obtain spectra of a single atom, but it can also provide valuable new information on the excitation properties of specific elements.
詳細はこちら
High angle annular darkfield image of an interconnect structure

Chemical Composition of Semiconductor Interconnects

Standard energy dispersive X-ray spectroscopy (EDS or EDX) using detector areas of 30mm2 on conventional scanning transmission electron microscopes (STEM) can deliver element mappings with nm resolution within a few minutes. The condition is, that the detector head is small enough (in slim-line design) to get as close to the specimen for (high solid angle) and as high above the specimen (for high take-off angle) as possible. The latter helps to avoid shadowing and absorption effects.
詳細はこちら
RAM microchip elemental distribution map

High Resolution Mapping of a Semiconductor RAM Microchip Using STEM-EDS in SEM (T-SEM)

Element distribution mapping of semiconductor nanostructures with X-ray based methods is not always straight forward. The need of nanoscale spatial resolution and X-ray peak overlaps are common challenges when investigating semiconductor materials. Sometimes it can be beneficial to use the SEM instead of expensive TEM tools and time for characterization.
詳細はこちら
ナノマテリアル
Bright field image and single element maps of a yeast cell

米apping a Magnetic Nanostructure

The specimen consists of a SiO2 sphere coated with nm-thin layers of tantalum (Ta), ruthenium (Ru) and topmost a mixture of cobalt (Co), platinum (Pt), chromium (Cr) and oxygen (O).
詳細はこちら
HAADF image of Pd-Pt core shell particles

Qualitative and Quantitative Mapping of a Pd-Pt Core Shell Particle

Core shell particles play an increasingly important role in nanotechnology, particularily in catalysis. This application example presents element maps of a Pd-Pt core shell nano-particle.
詳細はこちら
HAADF image and intensity line scan of a InGaAS semiconductor structure

Atom Column EDS Analysis

Properties of a semiconductor are determined by its structure on the atomic level, e.g. by point defects. Using EDS mapping at highest possible resolution it is possible to locate and characterize such defects.
Read more
バイオマテリアル / ソフトマテリアル
Spectrum of the LaB6 standard used for Cliff-Lorimer factor calibration

Quantitative Analysis Using LaB6 as an Example

Lanthanum hexaboride (LaB6) is a very illustrative example for quantitative EDS analysis in S/TEM, since it contains two extremes, a very light element (B) and a heavy element (La).
詳細はこちら
Bright field image and single element maps of a yeast cell

EDS for Life Science

EDS in S/TEM is particularly useful if many elements in a material have to be determined at once. This is the case for quite a few life science applications.
詳細はこちら
米alaria parasite in human blood cell

Chemistry of a Malaria Parasite in Human Blood and Immunolabels in a Yeast Cell

Energy dispersive X-ray spectroscopy (EDX or EDS or EDXS) in transmission electron microscopy (STEM) can contribute valuable data in life science, for example for cell and tissue imaging. Silicon drift detectors, used for EDS, have become so sensitive in the lower energy region, that the detection of small amounts of light elements relevant for life science, such as calcium, oxygen, nitrogen and sulfur, is routinely possible now.
詳細はこちら
その場分析
In-situ element map

In-situ Element Mapping at Elevated Temperatures

The use of heating holders, or any other in-situ reaction cells, which are suitable for electron microscopy and EDS, allows to monitor the effect of materials treatment in-situ or in-operando in the electron microscope. This means that information on changes in structure and element composition is available qualitatively and quantitavely with high spatial resolution.
詳細はこちら
Identifying individual sulfur atoms with EDS on TEM

Individual Heteroatom Identification with X-ray Spectroscopy

个人杂原子在纳米尺度的垫子上erials often play a pivotal role in materials properties. To obtain maximum control over materials properties, researchers must be able to detect and identify diverse heteroatoms in samples with varying thickness and composition.
詳細はこちら

ウェビナー

ウェビナー動画

XFlash 7 EDS detector series element analysis EDS
ON-DEMAND SESSION - 35 MINUTES

Introducing the XFlash®7 EDS Detector

In this webinar we present the benefits of this new detector series and discuss specifics of microscope detector geometries. We also show examples of data acquisition and analysis across different fields of application.
Element distribution in FIB lamella by SEM EDS
ON-DEMAND SESSION - 57 MINUTES

Optimizing Semiconductor-based LED Devices Using EDS of Electron Transparent Specimens in STEM/SEM

在t半导体结构的理解he nanoscale mostly needs high-end analytical scanning transmission electron microscopy including the respective method combination and complex specimen preparation. Here UV-LEDs have been recently tested for skin-tolerant inactivation of SARS-CoV-2 and multi-resistant bacteria.
Significance of STEM-EDXS Analysis in the Characterization of Rechargeable Battery Components
ON-DEMAND SESSION - 49 MINUTES

Significance of STEM-EDXS Analysis in the Characterization of Rechargeable Battery Components

Discussing the use of STEM-EDXS to identify sulfur impurities inside nanopores and at grain boundaries that otherwise go undetected in EELS.

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