반도체 솔루션

현재 및 미래의 반도체 제조 공정용 공정 장비 및 측정 솔루션.

반도체용 측정 솔루션

Bruker Semiconductor는 새로운 고속 비접촉, 비파괴 X-레이 기술의 기반인 박막용 측정 솔루션을 개발, 제조, 시판, 지원하고 있습니다. 탁월한 전 세계적 고객 서비스 및 지원으로 명성이 높은 Jordan Valley Semiconductors를 Bruker가 인수하며 전 세계 25대 반도체 제조업체 중 75%가 차세대 박막 개발 등 다양한 분야에 전면적으로 또는 이면적으로 Bruker 측정 도구를 사용하게 되었습니다. Bruker는 혁신과 기술적 리더십으로 측정 분야에서 새로운 진보를 앞장서 이끌고 있으며, 이는 수많은 수상 경력과 업계의 평판으로 증명이 됩니다.

C-S 박막 재료 특성화부터 웨이퍼 기질 분석, 결함 탐지에 이르기까지 다양한 분야에서 Bruker의 시스템이 시뮬레이션 분석 및 적용에 활용되고 있습니다. HRXRD, XRR, WA-XRD, XRDI 측정 유형이 완전히 지원되므로, 연구자와 생산 엔지니어, 공정 개발자 모두 탁월한 기능을 경험할 수 있습니다. Bruker는 고객의 측정 요구에 맞게 특화 설계된 솔루션을 제공하여, 반도체 업체, C-S 팹, R&D 센터, 아카데미, 산업 재료 연구소 등 어떠한 유형에도 대응해드릴 수 있습니다.

Automated-AFM

Automated AFM Metrology

Automated AFM metrology solutions reliably measure surface roughness, chemical mechanical planarization (CMP), and etch-depth features
TriboLab CMP polished sample

Chemical Mechanical Polishing

Cost-effective benchtop polishing and material and process characterization for wafers
Wafer being cleaned with crygenic CO2 process

低温干洗

Cryogenic CO₂ Cleaning Systems remove contaminants and residues from wafers and electronic devices
SmartProber during measurement on silicon wafer

Current-In-Plane Tunneling (CIPT)

Current-In-Plane Tunneling is a very fast and cost effective method to characterize Magnetic Tunnel Junctions (MTJ’s).
OVERVIEW-filmtek

Film Thickness and RI Semi Metrology

Specialized thin film metrology systems for wafer and CD metrology, designed to meet requirements not measurable with conventional equipment
Nanomechanical-Metrology-Tools-Teaser-BRUKER

纳米机械计量工具

Automated metrology solutions deliver high-speed, high-resolution, highest-sensitivity mechanical property and/or interfacial adhesion measurements
photomask-repair

Photomask Repair

Precise, accurate photomask repair systems address the critical production issue of controlling pattern defects on high-end photomasks
Stylus Profilometers

Stylus Metrology

Surface roughness characterization, step height measurements, and film stress analyses
Electronic-circuit-board-futuristic-server-code-teaser-STOCK

White Light Interferometry

Advanced WLI profilers provide robust metrology-based inspection for advanced packaging applications
clean-bare-wafers-teaser

X-Ray Defect Inspection

Bruker defect detection systems detect crystalline defects, such as cracks, slip, dislocations, and micropipes on single-crystal substrates
close-up-of-patterned-wafer-teaser

X-Ray Metrology for Compound Semi

Diverse x-ray metrology systems deliver high-quality QC monitoring and detailed R&D analysis of epi-layer films
Silicon-patterned-wafer-teaser

X-Ray Metrology for Silicon Semi

Non-destructive x-ray metrology solutions for thin-films identifying substrate defects and performing front end of line control of epi films and high-k dielectrics, as well as analyzing metal films and wafer-level packaging bumps

Support

How Can We Help?

Bruker partners with our customers to solve real-world application issues. We develop next-generation technologies and help customers select the right system and accessories. This partnership continues through training and extended service, long after the tools are sold.

Our highly trained team of support engineers, application scientists and subject-matter experts are wholly dedicated to maximizing your productivity with system service and upgrades, as well as application support and training.