DIFFRAC。XRR

DIFFRAC。XRR features two different analysis approaches to best fit the user’s requirements:

• Fast Fourier Transform (FFT) method for a quick layer thickness estimation from the X-ray Reflectometry (XRR) curves with a single mouse-click.
• Detailed XRR analysis via sample-model based fitting using dynamical scattering theory.

DIFFRAC。XRR is designed to maximize the user’s efficiency throughout the entire analysis process – from the creation of the sample model to the reporting of the results:

• Flexible sample modelling including formula-based parameters and free fitting variables.
• Comprehensive and extendable databases for materials and samples.
• Advanced automation and workflow capabilities including macro-recording and step-by-step execution.
• Automated analysis and display of series of reflectivity measurements.
• Evaluation of wafer mapping data including customizable contour plots and statistical analysis.
  
• Powerful and extensive report generator featuring template capability.
  

When the analysis task consist's in extracting a layer thickness, then DIFFRAC.XRR sets the benchmark: With a single mouse-click, the Estimate tool evaluates the layer thicknesses via a Fast Fourier Transform and directly displays the result in the corresponding graph of the XRR measurement.

DIFFRAC。XRR features a comprehensive and extendable material database. It includes amorphous and crystalline materials as well as mixed crystals up to quaternary compounds. The database offers calculation of structure factors or hkl patterns as well as X-ray properties like absorption, penetration depth, index of refraction, polarizability. To facilitate the creation of new database entries, .cif files and .str files can be directly imported.

DIFFRAC。XRR comes with a powerful sample database.

Complex samples structures can be created, stored, and then directly loaded into the current analysis project. This increases the efficiency in daily routine work significantly.

Sharing the sample database with the measurement software DIFFRAC.SUITE also allows for more efficient planning of the experiments and thereby greatly supports the PLAN.MEASURE.ANALYZE philosophy of the DIFFRAC.SUITE software platform.

Routine X-ray reflectivity analysis has never been easier: DIFFRAC.XRR can record macros and execute them in a single run or in a step-by-step mode.

The Workflow Designer offers an intuitive interface for the creation of workflows that guide the user through the analysis or run it even fully automated – from importing of the measurement data to the reporting of the results.

Wafer or area mapping allows for the determination of lateral homogeneities of the sample.

DIFFRAC。XRR features full wafer analysis: Each refined sample parameter can be displayed as a contour, detailed statistics on the parameters can be displayed and sections along the surface allow for a detailed look at the local sample properties.