DIFFRAC.XRR
Основныемоменты
全面的x射线反射计分析
DIFFRAC.XRRfeatures two different analysis approaches to best fit the user’s requirements:
- 快速傅里叶变换(FFT)方法快速层厚度估计从x射线反射计用鼠标(XRR)曲线。
- 详细的XRR分析通过使用动态散射理论基于样本模型的拟合。
DIFFRAC.XRRis designed to maximize the efficiency throughout the entire analysis process – from the creation of the sample model to the reporting of the results:
- 灵活的样本模型包括公式参数和免费的拟合变量。
- 全面的和可扩展的数据库材料和样品。雷竞技网页版
- 先进的自动化和工作流功能包括宏录制和按部就班地执行。
- 自动分析和显示一系列的反射率测量。
- 评估晶圆映射的数据包括可定制的轮廓图和统计分析。
- 强大和广泛的报告生成器模板功能。
Особенности
即时XRR分析使用FFT分析
在提取分析任务由一层厚度、DIFFRAC。XRR设置基准:鼠标,评估工具评估层厚度直接通过快速傅里叶变换和dis-plays XRR导致相应的图的测量。
详细的XRR分析通过完整的配件
DIFFRAC.XRRapplies the dynamical scattering theory to perform accurate simulations. The parameters of the sample model (e.g. thickness, roughness, mass density) are optimized by least-squares method to fit the XRR curve to the measured data. Experimental contributions like instrumental resolution, background, and the sample size are integrated to accurately describe the measurements. Different fast and stable fitting algorithms ensure best convergence and provide reliable results.
综合材料数据库
DIFFRAC.XRRfeatures a comprehensive and extendable material database. It includes amorphous and crystalline materials as well as mixed crystals up to quaternary com-pounds. The database offers calculation of structure factors or hkl patterns as well as X-ray properties like absorption, penetration depth, index of refraction, and polarizability.To facilitate the creation of new database entries, .cif files, and .str files can be directly imported.
样本模型定义与无与伦比的灵活性
从简单的单层高度复杂的样品含有超晶格和梯度- DIFFRAC。XRR大师。各种界面粗糙度模型允许一个精确的描述不同的发展形态。层参数与施加约束。和另外的可用性用户定义的自由变量集的新标准样本建模的灵活性。
示例数据库更快和更有效的工作
DIFFRAC.XRRcomes with a powerful sample database.
复杂的样品结构可以创建,存储,然后直接加载到当前分析项目。这大大增加了日常工作的效率。
与测量软件DIFFRAC分享sample数据库。套房还允许更有效的计划的实验,从而极大地支持PLAN.MEASURE。分析哲学的DIFFRAC。套件软件平台。
无与伦比的报告功能
DIFFRAC.XRRincludes a professional print-ing and reporting system for the creation of reporting or publication-ready graphics and full analysis reports.
可以生成用户定义和完全可定制的报告模板。报告可以直接打印,以pdf格式文件共享,或进一步编辑docx文件。
自动化
DIFFRAC。XRR、x射线反射率分析已经变得比以往任何时候都更容易:
- 捕获一个工作流随时在您创建和重用它。
- 使用直观的工作流设计器来创建定制的工作流。
从测量数据的导入的报告结果,DIFFRAC。XRR提供直观的用户指导和自动化。
执行工作流
DIFFRAX。XRR执行工作流提供了两种不同的实现:
- 工作流可以由一个外部程序,称为控制台模式。这是使一个集成到全自动薄膜分析解决方案。
- 跑步者允许循序渐进和退一步excecution的工作流进行最大限度的控制和用户交互。
输出结果
XRR分析的结果通常需要报告或进一步proces-sing出口。DIFFRAC.XRRallows exporting of the following parameters into csv format:
- 精致的样本模型。
- 免费样品的参数列表。
- Peaklists PeakSearch和FFT分析。
分析测量系列
频繁,XRR执行调查与样品温度或压力变化条件下,例如。
DIFFRAC.XRRenables the easy and fast analysis of such data series: each refined parameter of the sample model can be evaluated individually as a function of the condition. Additionally, the statistical analysis can provide maximum insight into the sample’s properties and behavior.
详细的薄片分析
晶片或区域映射允许横向样本的异同的决心。
DIFFRAC.XRRfeatures full wafer analysis: each refined sample parameter can be displayed as a contour plot, detailed statistics on the parameters can be displayed, and sections along the surface allow for an in-depth look at the local sample properties.
灵活的报告measument系列
DIFFRAC.XRRsupports the reporting of results from wafer mappings and other XRR measurement series: customized templates can be created including waterfall plots, con-tour plots for the different sample parameters, or tables to present the results in a more compact way; reports can be saved in .pdf format.
Дополнительнаяинформация
DIFFRAC.XRRResources
Поддержка
保持你的DIFFRAC。XRR最新
免费维护更新
自由DIFFRAC。XRRversion XRR维护更新更新到最新版本雷竞技官方网站。不管你的XRR许可证级别,您可以从www.brukersupport.com下载最新的维护更新,免费的!
下载过程
- 注册在力量客户支持
- 点击“软件”按钮
- 寻找DIFFRAC。XRR维护更新
- 下载更新
修正
通过保持你的DIFFRAC。XRR最新, you will benefit from all bugfixes made for the current but also all previously released versions, regardless of the license level. DIFFRAC.XRR Maintenance Updates are cumulative and can therefore be applied to any previous version.
升级是什么?
DIFFRAC.XRRMaintenance Updates do not come with new features. If you want to benefit from features introduced in new major releases you need to purchase the latest DIFFRAC.XRR upgrade.
