Flat plug type spectrometer XFlash^®FlatQUAD

XFlash^®FlatQUAD, QUANTAXThe core of FlatQUAD,Based on the concept of a new detector.This will probe placed between the pole shoe and samples.Therefore, the detector installed in the SEM bin level on port.Traditional detector rarely extends to the pole shoe below, you need to use the tilt port.In order to ensure that compatible with many different types of SEM, the detector can accurate positioning on the X, Y, and Z direction.

XFlash^®FlatQUAD contains four independent silicon drift detector chip, they around the detector module in a hole in the ring.Electron beam through the hole in the middle.Due to this design, and maintain the demand of the detector as thin as possible, we need to use a new way to prevent back scattered electron reaches the detector chip.The detector is equipped with different thickness of special polymer window.They absorb backscattered electron, at the same time, X ray will be allowed to pass.Polymer window is installed in the slider, allowed without affecting the vacuum conditions change.This makes when the probe in the measurement position, the SEM of the accelerating voltage can still change.

The location of the detector chip and size (4 x 15 mm²Effective area) for X-ray collection of SEM provides the most solid Angle.Collection efficiency can lead to high count rate.Therefore, all four detector chip are equipped with a single signal processing channel.This allows up to 4 million CPS input count rate (ICR) and the combination of up to 1.6 million CPS output count rate (OCR).XFlash^®FlatQUAD CPS input under the count rate in 100000 to provide a Mn K alpha 126 eV (51 eV equivalent C K and F K 60 eV) such good energy resolution.In addition, alpha 129 eV and 133 Mn K level can also provide the resolution of the eV.