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The electron microscope analyzer

XRF QUANTAX micro area

Super element sensitivity, almost no sample preparation

High speed (large) X-ray element analysis

Analysis of thin film thickness

Bright spot

10
PPM
Detection limit
With background of XRF spectrum diagram below EDS spectra, Micro - XRF trace element analysis can be realized
4
Mm/s
Movement speed
Optional quick sample support large areas of high speed surface analysis
1 nm - 40 microns
The thickness range
Can be analyzed from 1 nm to 40 microns thin film with multi-layer structure

Micro area XRF is SEM EDS analysis of complementary analysis technology

  • Scanning electron microscope (SEM) the Micro area of X-ray fluorescence (Micro - XRF) technology is a traditional and energy dispersive spectrum (EDS) ability to add nondestructive analysis.The analytical techniques for characterization of unknown elements in the sample is very important, and the size of the unknown sample can be from cm size of non-uniform samples to micron sized particles
  • X-ray excitation source for trace elements brought higher detection sensitivity (for some elements, detection limit as low as10 parts per million (PPM).At the same time, the spectral range can be future extension (As much as 40 keV), and the detecting depth is deeper
  • Equipped with X ray tube, combined with micro focus X-ray optics, can be producedSmall beam spot of 30 micronsFlux and high strength
  • Modularization based on the sample of the piezoelectric, specially designed for installation on the existing SEM samples, make large elements of high-speed X-ray surface analysis "fly to" run,Speed up to 4 mm/SEC.This makes in 50 x 50 mm (or more) of sample area X-ray distribution data possible.At the same time, the light spectrum data and trace elements and/or higher energy X ray data is also included in quick and user-friendly workflow
  • The sample of the X-ray excitation depth deeper, characterization of the multilayer system possible.1 nm toAs much as 40 micronsThin film samples can be analyzed, and this is source excitation cannot be achieved by the electron beam
Contact us Rapid phase

advantage

Through the Micro - XRF and SEM analysis of rapid sample stage extend your ability

  • Double beam voltage, including electron beam and X-ray beam, it provides a new possibility for materials characterization - two beam source can be used at the same time to investigate the samples
  • Use the same detector simultaneously electron beam/micro zone XRF signal acquisition, including the light spectrum data, trace elements and/or higher energy X ray data
  • The -xtrace andfastAre seamlessly integrated into the sampleESPRIT software
  • EDS quantitative method combining XRF and micro area, the better the light sensitivity of electronic excitation with XRF better characterization of trace element sensitivity, produce more complete sample characterization results
  • Were characterized and micro zone XRF and beam synchronous surface analysis, combined with the two technical advantages.Using electron beam excitation lighter elements (carbon to sodium), using the micro area XRF inspire the heavier elements
  • Stripping the spectrum of fengfeng value and the expansion of the spectral range of enables users to see high K line, because they are not complicated and overlapping peaks less
  • Almost do not need sample preparation - not conductive sample surface, no polishing
  • Contains no sample and prototype quantitative model

application

In microns and lower levels, also can at the same time analysis of light and heavy elements

From Chile, el tesoro mines exotic Cu samples.

Mineralogy samples large-area surface analysis

New rapid sample designed for SEM, which can realize large area on the millimeter to centimeter scale surface analysis.This will eliminate the associated with low magnification surface analysis of X-ray intensity change artifacts, resulting in increased previously impossible elements and mineralogical information in the limited time.
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Exotic Cu deposit the sample area map.

The elements in the Exotic - Cu deposit and mineral distribution

Ability to observe changes of an element in the sample are very important to understand the geological processes and ore deposit genesis.During SEM used to the area of XRF double beam system can be conducted on large sample element X-ray surface analysis, thus the PPM dimensions shown on the primary, secondary and trace elements.
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New Zealand karan huck gold samples.

Exploration and mining of the double beam applications: table hot samples containing Au

Micro zone of the combination of XRF and SEM enables us to analyze samples in a single system with multiple scales, from cm to mm, even to the micron and the following.Therefore, by the micro area XRF is added to the SEM, SEM can be converted to double beam system, this means that there are two signal excitation source, namely, electron beam and X-ray beam.Any beam source can be used alone, can also be used to stimulate the sample at the same time produce x-rays, and these samples will use the same EDS detector is measured.
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Large area map containing gold.

The source mantle petrological and diamond

Here, we show a SEM, XRF element distribution, from the Newlands containing diamond kimberlite (South Africa, karp anwar carats) the mantle of garnet and olivine.The strength of the various elements of some minerals exist in the distribution according to the sample.
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The large area map of soil samples.

Soil pollutants and toxins in the appraisal

With the sample of the rough surface can use SEM - XRF perform large surface analysis (HyperMap).When using micro zone XRF were characterized, sample preparation, almost don't need can be directly analyzed samples.This is particularly important in the analysis of soil, because any form of sample preparation, such as sample set and polishing or carbon coating samples are likely to change.
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CIGS structure

Using SEM micro area of XRF analysis of thin film

X-rays can through the material, so the X-ray fluorescence (XRF) can be used to determine the film thickness of samples.Using micro zone on SEM, XRF, can use the micron scale spatial resolution layer analysis (thickness and composition).Analysis is the basis of using atomic layer parameters (FP) for the composition of each layer quantitatively.
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accessories

Fast sample units

Fast sample units can be installed at the top of the SEM sample sets, is used to realize fast surface analysis on large sample area.

webinar

webinar

Large area mapping using an SEM can be hampered by the missile movement of a standard SEM stage.
ON - DEMAND SESSION - 52 MINUTES

Large area SEM mapping using the Rapid Stage

Large area mapping using an SEM can be hampered by the missile movement of a standard SEM stage.
Micro - XRF analysis on a Scanning Electron Microscope (SEM)
ON - DEMAND SESSION - 60 MINUTES

High -speed Mapping using Micro - XRF on SEM

The Rapid Stage is operated in conjunction with The micro - XRF source to acquire elemental and mineralogical information at an impressive speed.
Csm_2018_Expanding_your_SEM_capabilities_with_Micro XRF_for_SEM -- webinar_9aeff5edb8
ON - DEMAND SESSION - 66 MINUTES

Expanding your SEM "capabilities with Micro - XRF for SEM

A. Menzies demonstrates how Micro - XRF combined with A SEM EDS - extends the analytical "capabilities of the system.

News and events

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Resources and publications

1 - scanning electron microscopy (sem) on micro fluorescence (micro - XRF) and rapid sample introduction
2 - mount samples, began to test
3 - analysis, we get the data

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