The micro areaThe combination of XRF and SEM makesIn a single system can analyze samples with multiple scales, from cm to mm to microns and even micron.Therefore, by the micro area added to SEM, XRF converts SEM to double source system, which means that there are two signal excitation source, namely, electron beam and X-ray photons.Any one source can be used alone, can also be used to generate the samples at the same time characteristic X ray, will use the same sample EDS detector is measured.In addition, you can use the advantages of each analysis: (1) background of XRF source is very low, this means that you can observe the element concentrations as low as 10 PPM (related to the elements and sample matrix), and greater depth of information, this means that you can view the sample below the surface of the structure or element.For example, even in very low concentrations, can also be detected under the surface of the inclusions;(2) of the electron beam can be focused to a tiny areas, and generate high resolution information.
This combination can now create a new workflow in a single system.For example, you can quickly scan a large rock samples, in this case, the use of micro area of XRF analysis from a Karangahake epithermal gold samples, containing Au grain can be determined (figure 1 and 2).Then, these we can take advantage of the electron beam at a higher resolution analysis "interested area" (figure 3).Therefore, the double beam system can identify large-scale at the same time to mm (cm) of relevant information, and can efficiently and accurately perform detailed analysis of the small scale to microns (mm).