Variation in thickness of coating surface scanning analysis
The sample is made of light auxiliary electrolytic test device.Is Cu - Al by magnetron sputtering target material single-layer coating glass substrate, the surface has a concentration gradient.
X ray is penetrating, XRF often used for coating thickness of sample analysis.In micron scale has good spatial resolution, making micro zone XRF to gradient coating (thickness and composition) and fast surface scanning analysis.Plating analysis can be the basis of the fundamental parameter method, combining with the standard sample to enhance the analysis accuracy., therefore, not only can be used to accurately test "prototype" mature common coating samples, such as the ENEPIG coating, ZnNi coating or welding layer, etc., can also be applied to the production of new type of coating sample research and development.
Step to 50 microns diameter, single pixel integration time 50 ms the entire sample of 5 x 5 cm2 face scans.Can be intuitive show clearly Al and Cu element concentration distribution of the gradient.
Use Qmap feature analysis of the sample (used for layer thickness analysis, 5 x5 can produce 250 microns resolution), Cu in Si: Al thickness quantitative analysis.Although there is no standard sample samples of the new system, based on the analysis method of basic parameters for peak results tally with developers expect very still.