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AFM mode

DataCube mode

Multidimensional nanoscale information can provide each pixel

Nano electrical characterization of comprehensive solutions

By enabling collection of multidimensional data cube, extends the DataCube modePeakForce TUNAandPeakForce KPFM, and other functions.For materials scientists and engineers, it can break down barriers of the long-term efficiency and characterization.These new capabilities can take advantage of the high density data cube collection of nanoscale electronic and mechanical properties, before this can be achieved by a single measurement.

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Multidimensional electrical associated spectrum

Dimension XR DataCube model can provide a multi-dimensional nanoscale information at each pixel, in a single measurement synchronization acquisition in the electrical and mechanical properties.

DataCube mode usingFASTForce VolumeTo user defined "dwell time" at each pixel execution - distance measurement.Within the residence time, with extremely high data acquisition rate of electrical measurement, which produce electrical and mechanical spectrum at each pixel.Typical force - distance measurement with 40 Hz, the residence time of each pixel is 100 milliseconds, can provide the complete characterization by single experiment, this is unique in the commercial AFM.At the same time presents the morphology, mechanical and multidimensional electrical information is no longer a time-consuming effort.Now, by the conventional AFM measurement can get such data.DataCube model can be used each time the compound data scanning, multi-dimensional data cube at the nanoscale.This support a series of powerful new pattern.

DataCube - TUNA (DCUBE - TUNA)

CAFM results affected by sampling the voltage applied, shows that material or devices can follow the influence of applied voltage and a major change in performance.Can DCUBE - TUNA in a single measurement of synchronous nano mechanical information to get a lot of sampling voltages and electrical conductivity, to build dense data cube sample information.This is the only can provide the sample conductivity comprehensive representation model, including conductive type (ohm, non-ohmic, schottky, etc.) and detailed information such as barrier height.

When each pixel in the sampling voltage increased from 2 v to + 2 v, the magnetic hematite (gamma Fe2O3) on the current image.Different grain with different conductive mechanism, by scanning voltage will highlight the data as a "slice".

DataCube - SCM (DCUBE - SCM)

Scanning capacitance microscopy (SCM)Provides a direct measurement activity carrier concentration in nanoscale precision method.DCUBE - SCM can in a single measurement to a large number of sampling voltage synchronization for nano mechanics and carrier information.This technique provides a unique way to observe dC/dV the change of amplitude and phase dC/dV value and position of the deviation.By generating data cube, researchers can observe the oxide thickness and oxide charge, threshold voltage, flow ion pollution and interface trap density, etc. Additional information.

By voltage from - 2 v increases to 2 v dC/dV amplitude slice, can display the PNP knot section along with the change of voltage.Data by courtesy of the French atomic energy commission electronics and information technology laboratory and the university of Grenoble Alps - n. Chevalier and d. Mariolle provided.
When sampling voltage increased from 2 v to + 2 v, the adjacent two PNP transistors in an SRAM memory on the dC/dV amplitude images.Pressure-sensitive p-n junction position correspond to expected behavior.Some mixed defects only visible under certain voltage.Scanning size for the 3 x3 microns.Data by courtesy of the French atomic energy commission electronics and information technology laboratory and the university of Grenoble Alps - n. Chevalier and d. Mariolle provided.

DataCube - PFM (DCUBE - PFM)

Piezoelectric response pressure (electricity) microscope (PFM)Is a kind of can in the nanoscale inverse piezoelectric effect of sample imaging technology.DCUBE - PFM can synchronize access to the nano mechanics information in the data cube and PFM amplitude/phase spectrum, and reveals a single data set each of the domain switching voltage.In addition, DCUBE - PFM overcame and traditionContact modeMethods related artifacts, damage to the sample, and the complexity of data analysis.

DCUBE - PFM height and PFM image (left) and along the length of 1.2 (including m line through the BFO ferroelectric samples multiple domain spectra (right).Figure shows the process from increase to 0 v to 6 v, the amplitude and phase of PFM relations with bias voltage.Can be extracted for each individual domain switching voltage.

DataCube - CR - PFM (DCUBE - CR - PFM)

DCUBE piezoelectric response pressure (electricity) microscope combined with contact resonance, offers DCUBE - the advantages of PFM, moreover also includes slopes at each pixel with frequency, and provide the full spectrum and peak when the contact resonance sensitivity, etc.

In LiTaO3 sample DCUBE - CR - PFM data show the morphology, contact resonance (CR) of PFM amplitude, phase and PFM CR peak number of piezoelectric response to zero when the material (not shown).Shows a few pixels of PFM amplitude and phase and frequency spectrum corresponding to figure, and the corresponding power spectrum.

DataCube - the SSRM (DCUBE - the SSRM)

Scan diffusion resistance microscope (the SSRM)For change of doped semiconductor majority carrier concentration in imaging.DCUBE - the SSRM can synchronization in a single measurement for nano mechanics information carrier density and 3 d imaging.The generated data cube can provide comprehensive characterization, including the nanoscale morphology, mechanics and logarithmic resistance spectrum information.In addition, I - V measurement can display conductivity for ohm, non-ohmic, schottky, or other types.

Here the image series shows the Dimension Icon XR DataCube on how the SSRM helps to group distribution in imaging and reveal dramatic changes between particles.The DataCube mode available modulus figure will hard metal oxide particles with a clear distinction between soft glue around the area, and at the same time to obtain the conductivity of the drawings reveals the uneven distribution of carbon black.As you can see, the images near the top edge of a particle is not covered by carbon black, and a set of electrical conductivity extracted from the same data cube images will be the particle identification for the dead, in the whole working voltage range in the inactive state.

DataCube - sMIM (DCUBE - sMIM)

Scanning microwave impedance microscope (sMIM) imaging can be user defined sampling voltages, the impedance of the capacitance (C) and resistance (R) and dC/dV and dR/dV data imaging.Using DCUBE - sMIM, available in a single scan in all kinds of common characteristics under different sampling voltage - and immediately available "panorama".Spectrum also revealed other information, such as conductive type (ohm, non-ohmic, schottky, etc.), oxide thickness and oxide charge and flow of ions caused by pollution, and interface trap density.

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Has opposite doped type of force and time of two pixels and capacitor (sMIM - C) and time diagram.In 100 ms for time for typical s-shaped C -v curve, n and p type are visible.These images show the DataCube mode with double ladder section of Si samples under three different sampling voltage "slices" (see sample description: DOI: 10.1016 / j.m icrorel. 2014.07.024, Infineon Munich).Under different voltage, n and p type area of contrast and sensitivity are different.

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