Brooke industry-leading Hysitron ® scanning probe microscope (SPM) can be used to have now89 SEM PicoIndenter Hysitron PIIn situ scanning electron microscope (SEM).By using the sensor scans the closed-loop control of piezoelectric drive, probe can be relatively samples rapidly progressive scan of nanometer precision.Based on force feedback of the sample has been formed surface topography imaging.
Although in the SEM can through secondary electron imaging to check the surface characteristics of high resolution, but obtain quantitative morphology data still has difficulty.SPM can use the same probe and the indentation test was carried out on the sample surface imaging, so as to solve the above problems.So you get the height of the sample accurate information and the surface roughness and other related parameters.This function for analyzing deformation after test (such as from the accumulation of measurement in the nano indentation and scratch or subsidence) is extremely practical.